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Synthesis of superconductive TaN thin films by reactive DC sputtering

Nieto Sánchez, Amanda G., Guzmán, Mario, Conde Gallardo, A., Contreras, O.
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Superconductive TaN thin flms synthesized with reactive direct current (DC) sputtering were grown on silicon substrates at 600°C for 60 min with variations of the N2 gas fow ratio (RN2). The microstru...

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Keywords: Thin filmsSuperconductorElectrical propertiesNitrides

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https://repositorio.cetys.mx/handle/60000/1427

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Atribución-NoComercial-CompartirIgual 2.5 México
Except where otherwised noted, this item's license is described as Atribución-NoComercial-CompartirIgual 2.5 México
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